Metal Oxide based Nanoparticles use for Pressure Sensor
نویسندگان
چکیده
The present review on some metal oxide nanoparticles used for pressure sensor, various metal oxide containing such as (SnO2, ZnO, Al2O3, WO3, Fe2O3, Ga2O3, TiO2 and SiC, ...etc.) responds detection pressure measure in kbar unit through oxygen activity as oxidation or reduction process of an integrated in devices sensor (MEMS, CMOS, MOX and MOXQ1D...etc.) that devices measuring of pressure as steam, air, gas, humidity and other substances. Pressure is extensive variable in physiochemical and thermodynamics investigation of matter at atmosphere.
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